JPH0373446U - - Google Patents

Info

Publication number
JPH0373446U
JPH0373446U JP13499789U JP13499789U JPH0373446U JP H0373446 U JPH0373446 U JP H0373446U JP 13499789 U JP13499789 U JP 13499789U JP 13499789 U JP13499789 U JP 13499789U JP H0373446 U JPH0373446 U JP H0373446U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
test head
contact
board
peephole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13499789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0729636Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989134997U priority Critical patent/JPH0729636Y2/ja
Publication of JPH0373446U publication Critical patent/JPH0373446U/ja
Application granted granted Critical
Publication of JPH0729636Y2 publication Critical patent/JPH0729636Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP1989134997U 1989-11-21 1989-11-21 半導体ウェハー検査装置 Expired - Lifetime JPH0729636Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989134997U JPH0729636Y2 (ja) 1989-11-21 1989-11-21 半導体ウェハー検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989134997U JPH0729636Y2 (ja) 1989-11-21 1989-11-21 半導体ウェハー検査装置

Publications (2)

Publication Number Publication Date
JPH0373446U true JPH0373446U (en]) 1991-07-24
JPH0729636Y2 JPH0729636Y2 (ja) 1995-07-05

Family

ID=31682290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989134997U Expired - Lifetime JPH0729636Y2 (ja) 1989-11-21 1989-11-21 半導体ウェハー検査装置

Country Status (1)

Country Link
JP (1) JPH0729636Y2 (en])

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3560907A (en) * 1968-05-17 1971-02-02 Peter V N Heller Test connector for microminiature circuits
JPS57103062A (en) * 1980-12-19 1982-06-26 Fujitsu Ltd Probe test device
JPS6143854A (ja) * 1984-08-08 1986-03-03 Hitachi Ltd 搬送波再生回路
JPS6178135A (ja) * 1984-09-25 1986-04-21 Mitsubishi Electric Corp 半導体ウエ−ハの測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3560907A (en) * 1968-05-17 1971-02-02 Peter V N Heller Test connector for microminiature circuits
JPS57103062A (en) * 1980-12-19 1982-06-26 Fujitsu Ltd Probe test device
JPS6143854A (ja) * 1984-08-08 1986-03-03 Hitachi Ltd 搬送波再生回路
JPS6178135A (ja) * 1984-09-25 1986-04-21 Mitsubishi Electric Corp 半導体ウエ−ハの測定装置

Also Published As

Publication number Publication date
JPH0729636Y2 (ja) 1995-07-05

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